| Language: | English |
|---|---|
| Type: | Article |
| Authors: | Kenichi Yoshikawa, Masakazu Makino, Satoshi Nakata and Toshio Ishii |
| Journal: | Thin Solid Films |
| Volume: | 180 |
| Number: | 1-2 |
| Month: | 11 |
| Year: | 1989 |
| Actual year: | 1989 |
| Pages: | 117-121 |
| doi: | 10.1016/0040-6090(89)90062-X |
Kenichi Yoshikawa, Masakazu Makino, Satoshi Nakata and Toshio Ishii, Thin Solid Films, 180, 117-121 (1989)