Language: | English |
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Type: | Article |
Authors: | Kenichi Yoshikawa, Masakazu Makino, Satoshi Nakata and Toshio Ishii |
Journal: | Thin Solid Films |
Volume: | 180 |
Number: | 1-2 |
Month: | 11 |
Year: | 1989 |
Actual year: | 1989 |
Pages: | 117-121 |
doi: | 10.1016/0040-6090(89)90062-X |
Kenichi Yoshikawa, Masakazu Makino, Satoshi Nakata and Toshio Ishii, Thin Solid Films, 180, 117-121 (1989)